Effect of autoionizing states with a high-lying spectator electron on population inversion of nitrogen plasma in recombining phase
Tokyo Institute of Technology, Department of Energy Sciences, Nagatsuta 4259, Midori, Yokohama, Kanagawa, Japan
Published online: 15 November 2013
Discharge produced plasma (DPP) is a promising tool to generate effective extreme ultraviolet (EUV) light. A hydrogen-like nitrogen ion emits light at 13.4 nm with an optical allowed atomic transition from n = 3 to 2, where n stands for a principal quantum number. We focus on the properties of population inversion between n =3 and 2 in recombining phase. Population inversion is calculated in the framework of population kinetics, and a gain coefficient G is estimated. In this study, dielectronic-capture ladderlike (DL) processes are included. At high density and low temperature, the DL deexcitations make a large contribution to the population inversion.
© Owned by the authors, published by EDP Sciences, 2013
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