Thin-Film Microtransformer for High Frequency Power Applications
1 Würth Elektronik eiSos GmbH Co. KG, Parkring 29, 85748 Garching, Germany .
2 IMPT (Institute for Micro Production Technology), Leibniz Universität Hannover, An der Universität 2, 30823 Garbsen, Germany.
a Corresponding author: email@example.com
Published online: 3 July 2014
This paper describes a development of a microtransformer device fabricated using thin film technology. The device is designed for higher switching frequencies beyond to 50 MHz power applications. A especially by the microtransformer is a design, which allows wide flexibility of a device by choosing a different values of an inductance and of a windings ratio. The microtransformer device is integrated on silicon substrate consisting of a closed magnetic core and six coils. Both, primary and secondary device side consist three coils. Therefore, this design allows using of a device for different switching frequencies. As a magnetic material for transformer core a permalloy NiFe45/55 was chosen.
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