Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue

G. De Pasquale, E. Brusa and A. Somà

Mechanical Department, Politecnico di Torino, Corso Duca degli Abruzzi 24, 10129 Torino (Italy)
E-mail: giorgio.depasquale@polito.it, eugenio.brusa@polito.it, aurelio.soma@polito.it

Published online: 10 June 2010

This article has no abstract.