Towards High-Precision Optical Components Fabrication via Femtosecond Laser Micromachining

¹ Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
² Istituto di Fotonica e Nanotecnologie, IFN-CNR, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
³ HAWK Göttingen, Von-Ossietzky-Str 99, 37085, Göttingen, Germany;
⁴ Royal Institute of Technology, Department of Applied Physics, Roslagstullsbacken 21, 11421, Stockholm, Sweden.

^* e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

Published online: 22 September 2025

Abstract

Femtosecond laser micromachining (FLM) has emerged as a powerful technique for the precise fabrication of optical components, enabling high-resolution structuring in transparent materials such as fused silica and borosilicate glass. The nonlinear absorption mechanisms involved allow for localized modifications at the microscale with minimal thermal effects. In this work, we demonstrate the application of FLM for the fabrication of integrated optical beam splitters and microlenses. By carefully controlling laser parameters and subsequent post-processing steps, we achieve structures with high optical quality and functional performance. The results demonstrate the potential of femtosecond laser technology in integrating complex optical components, opening new possibilities for the development of lab-on-chip systems.