Plasma Surface Interaction for Constant Collisional Frequency

¹ Department of Physics, MM Engineering College, Maharishi Markandeshwar (Deemed to be University), Mullana-Ambala, Haryana, India - 133207
² Basic Theory and Simulation Division, Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India - 382428
³ Department of Mechanical Engineering, University Centre for Research and Development, Chandigarh University, Mohali - 140413, Punjab, India

^* Corresponding author: This email address is being protected from spambots. You need JavaScript enabled to view it.

Published online: 26 June 2026

Abstract

The present study considers a three-component electronegative warm plasma to examine plasma–surface interactions under the assumption of a constant collision frequency. Both positive and negative ions are treated within a fluid framework, whereas electron population is modelled using non-extensive statistical mechanics. To better represent realistic plasma conditions, the analysis incorporates ion–neutral collisional effects along with the concentration of negative ions, the mass of negative ions, and the temperatures of positive and negative ions. We have selected two different electronegative plasmas, C₆₀ and CF₄ plasmas, where the predominant species generated are C₆₀⁺ and C₆₀⁻, and CF₃⁺ and F⁻, to study the impact of the mass ratio of ions. They are equivalent to mass-ratio values of 1 and 0.275, respectively. The influence of collisional parameters and mass ratios on the velocity, net space charge density, electric potential, and density of positive ions has been analyzed to understand the realistic situation.