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Cited article:

Observation of extreme ultraviolet light emission from an expanding plasma jet with multiply charged argon or xenon ions

A. G. Shalashov, A. V. Vodopyanov, I. S. Abramov, A. V. Sidorov, E. D. Gospodchikov, S. V. Razin, N. I. Chkhalo, N. N. Salashchenko, M. Yu. Glyavin and S. V. Golubev
Applied Physics Letters 113 (15) (2018)
https://doi.org/10.1063/1.5049126

Extreme-Ultraviolet Light Source for Lithography Based on an Expanding Jet of Dense Xenon Plasma Supported by Microwaves

I. S. Abramov, E. D. Gospodchikov and A. G. Shalashov
Physical Review Applied 10 (3) (2018)
https://doi.org/10.1103/PhysRevApplied.10.034065