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Cited article:

A diagnostic study of a dual frequency–driven atomic oxygen plasma source in the context of contactless cleaning

Y Song, N Yang, M Poupouzas, R Morent, A Sobota and A Nikiforov
Plasma Sources Science and Technology 35 (2) 025011 (2026)
https://doi.org/10.1088/1361-6595/ae3fcc