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Cited article:

Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma

V.Yu. Yurov, E.V. Bushuev, A.P. Bolshakov, I.A. Antonova, V.G. Ralchenko, V.I. Konov

EPJ Web Conf., 149 (2017) 02013

Published online: 2017-08-04

DOI: https://doi.org/10.1051/epjconf/201714902013

This article has been cited by the following article(s):

Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties

Yuting Zheng, Yanwei Jia, Jinlong Liu, Junjun Wei, Liangxian Chen, Kang An, Xiongbo Yan, Xiaotong Zhang, Haitao Ye, Xiaoping Ouyang and Chengming Li
Vacuum 199 110932 (2022)
https://doi.org/10.1016/j.vacuum.2022.110932