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Cited article:

Air-gap-coupled MEMS-tunable Littrow SiN wavelength-division multiplexer

Mehdi Kharazmi, Pierre Pottier, Jayan Ozhikandathil and Muthukumaran Packirisamy
Journal of the Optical Society of America B 43 (3) A175 (2026)
https://doi.org/10.1364/JOSAB.580808