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Cited article:

Fabrication of shallow EUV gratings on silicon by irradiation with helium ions

J Kaufmann, R Ciesielski, K Freiberg, M Walther, A Fernández Herrero, S Lippmann, V Soltwisch, T Siefke and U Zeitner
Nanotechnology 36 (18) 185301 (2025)
https://doi.org/10.1088/1361-6528/adc4ec