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Characterizing time-dependent mechanics in metallic MEMS

L.I.J.C. Bergers, N.K.R. Delhey, J.P.M. Hoefnagels and M.G.D. Geers
EPJ Web of Conferences, 6 (2010) 40002
DOI: https://doi.org/10.1051/epjconf/20100640002


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