CVD diamond with boron-doped delta-layers deposited by microwave plasmaA.L. Vikharev, A.M. Gorbachev, M.A. Lobaev, D.B. Radishev, V.A. Isaev, S.A. Bogdanov, M.N. Drozdov, E.V. Demidov, E.A. Surovegina, V.I. Shashkin, P.A. Yunin and J.E. ButlerEPJ Web Conf., 149 (2017) 01010DOI: https://doi.org/10.1051/epjconf/201714901010
