The influence of design parameters on the performance of FBAR in 10–14 GHzN.I.M. Nor, R.A.M. Osman, M.S. Idris, N. Khalid, M. Mohamad Isa, N. Ahmad, Siti S. Mat Isa, Muhammad M. Ramli and S.R. KasjooEPJ Web Conf., 162 (2017) 01041DOI: https://doi.org/10.1051/epjconf/201716201041