Development of μ-PIC with resistive electrodes using sputtered carbonFumiya Yamane, Atsuhiko Ochi, Yasuhiro Homma, Satoru Yamauchi, Noriko Nagasaka, Hiroaki Hasegawa, Tatsuo Kawamoto, Yosuke Kataoka and Tatsuya MasubuchiEPJ Web Conf., 174 (2018) 04001DOI: https://doi.org/10.1051/epjconf/201817404001