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Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta₂O₅ thin films

Manuel Bärtschi, Daniel Schachtler, Silvia Schwyn-Thöny, Thomas Südmeyer and Roelene Botha

EPJ Web Conf., 255 (2021) 03005

DOI: https://doi.org/10.1051/epjconf/202125503005

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