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Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops

Thomas Flügel-Paul, Martin Heusinger, Kristin Gerold, Adriana Szeghalmi and Uwe Zeitner

EPJ Web Conf., 266 (2022) 03008

DOI: https://doi.org/10.1051/epjconf/202226603008

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