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Approaches for the RCWA-based non-destructive characterization of subwavelength-structured gratings

Julian Wüster, Andreas Reetz, Rüdiger Schmidt-Grund, Andrea Knauer and Stefan Sinzinger

EPJ Web Conf., 266 (2022) 05012

DOI: https://doi.org/10.1051/epjconf/202226605012

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