Selective ultrashort laser annealing of amorphous Ge/Si multilayer stacksNadezhda M. Bulgakova, Vladimir A. Volodin, Yuzhu Cheng, Yoann Levy, Jiří Beránek, Siva S. Nagisetty, Martin Zukerstein, Alexander A. Popov and Alexander V. BulgakovEPJ Web Conf., 266 (2022) 06012DOI: https://doi.org/10.1051/epjconf/202226606012
