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Aluminum nitride on insulator: Material and processing optimization for integrated photonic applications

Jasmin Spettel, Nikolai Andrianov, Florian Dubois, Hernán Furci, Tommaso Cassese, Marco Liffredo, Guillermo Villanueva, Niels Quack, Mohssen Moridi and Thang Duy Dao

EPJ Web Conf., 287 (2023) 01004

DOI: https://doi.org/10.1051/epjconf/202328701004

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