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Investigation on Subsurface Damage Patterns in Ultrashort Pulse Laser Machining of Glass using Optical Coherence Tomography

Samson Frank, Maria Reichenbächer, Michael Seiler, Thomas Arnold and Jens Bliedtner

EPJ Web Conf., 287 (2023) 05024

DOI: https://doi.org/10.1051/epjconf/202328705024

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