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Surface characterization in fabrication environments using angle resolved light scattering: From roughness and defect analysis to in-situ coating inspection

Anne-Sophie Munser, Tobias Herffurth, Marius Wyltschew, Thomas Gischkat and Sven Schröder

EPJ Web Conf., 309 (2024) 03023

DOI: https://doi.org/10.1051/epjconf/202430903023

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