Table-top HHG EUV scatterometry for roughness and structural parameters evaluation in nano-stacksVitaly Krasnov, Len Pasic, Analia Fernandez Herrero, Victor Soltwisch, Esben Witting Larsen, Kevin Dorney, Vicky Philipsen and Claudia FleischmannEPJ Web Conf., 335 (2025) 01019DOI: https://doi.org/10.1051/epjconf/202533501019
