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Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range

Thomas Siefke, Svetlana Shestaeva, Daniel Franta, Kristin Gerold, Adriana Szeghalm and Stefanie Kroker

EPJ Web Conf., 335 (2025) 08003

DOI: https://doi.org/10.1051/epjconf/202533508003

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