An XPS method for layer profiling of NbN thin filmsA.V. Lubenchenko, A.A. Batrakov, A.B. Pavolotsky, S. Krause, I.V. Shurkaeva, O.I. Lubenchenko and D.A. IvanovEPJ Web Conf., 132 (2017) 03053DOI: https://doi.org/10.1051/epjconf/201713203053