Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angleM.A. Lobaev, A.M. Gorbachev, A.L. Vikharev, D.B. Radishev, V.A. Isaev, S.A. Bogdanov, P.A. Yunin, M.N. Drozdov and J.E. ButlerEPJ Web Conf., 149 (2017) 02014DOI: https://doi.org/10.1051/epjconf/201714902014