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The influence of precursor gas pressure on structure and properties of fluoropolymer coatings by hot wire CVD

Alexey Safonov, Veronica Sulyaeva, Konstantin Kubrak, Sergey Starinsky and Nikolay Timoshenko

EPJ Web Conf., 159 (2017) 00042

DOI: https://doi.org/10.1051/epjconf/201715900042

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