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Oxidation of ablated silicon during pulsed laser deposition in a background gas with different oxygen partial pressures

Sergey V. Starinskiy, Alexey A. Rodionov, Yuri G. Shukhov and Alexander V. Bulgakov

EPJ Web Conf., 196 (2019) 00008

DOI: https://doi.org/10.1051/epjconf/201919600008

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