Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nmAnnemarie Finzel, Gregor Dornberg, Stephan Görsch, Martin Mitzschke, Jens Bauer and Frank FrostEPJ Web Conf., 215 (2019) 03004DOI: https://doi.org/10.1051/epjconf/201921503004