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Method for determination of resists parameters for photonic - integrated circuits e-beam lithography on silicon nitride platform

Ilia Elmanov, Anna Elmanova, Sophia Komrakova, Alexander Golikov, Natalya Kaurova, Vadim Kovalyuk and Gregory Goltsman

EPJ Web Conf., 220 (2019) 03012

DOI: https://doi.org/10.1051/epjconf/201922003012

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