An integrated exposure and measurement tool for 5-DOF direct laser writingJohannes Belkner, Johannes Leineweber, Georg Hein, Alexander Barth, Thomas Kissinger, Thomas Fröhlich and Eberhard ManskeEPJ Web Conf., 309 (2024) 03005DOI: https://doi.org/10.1051/epjconf/202430903005
