Development of μ-PIC with resistive electrodes using sputtered carbon Fumiya Yamane, Atsuhiko Ochi, Yasuhiro Homma, Satoru Yamauchi, Noriko Nagasaka, Hiroaki Hasegawa, Tatsuo Kawamoto, Yosuke Kataoka and Tatsuya Masubuchi EPJ Web Conf., 174 (2018) 04001 Published online: 21 February 2018 DOI: 10.1051/epjconf/201817404001