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Investigation of the properties of a 3-level broadband antireflective structure on silicon by THz time-domain spectroscopy

I.A. Tzibizov, G.I. Kropotov, V.S. Pavelyev, K.N. Tukmakov and A.S. Reshetnikov

EPJ Web Conf., 195 (2018) 06016

Published online: 23 November 2018

DOI: 10.1051/epjconf/201819506016

I.A. Tzibizov

G.I. Kropotov

V.S. Pavelyev

K.N. Tukmakov

A.S. Reshetnikov

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