EPJ Web of Conferences

Effect of annealing time on aluminum-induced crystallization of silicon suboxide thin films

Alexandr Zamchiy, Evgeniy Baranov, Sergey Khmel and Marat Sharafutdinov

EPJ Web Conf., 196 (2019) 00039

Published online: 14 January 2019

DOI: 10.1051/epjconf/201919600039

Alexandr Zamchiy

Evgeniy Baranov

Sergey Khmel

Marat Sharafutdinov

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