Features of DLW-STED nanolithography for quantum optics A.G. Vitukhnovsky, D.A. Chubich, D.A. Kolymagin and R.D. Zvagelsky EPJ Web Conf., 220 (2019) 01014 Published online: 25 October 2019 DOI: 10.1051/epjconf/201922001014