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Selective ultrashort laser annealing of amorphous Ge/Si multilayer stacks

Nadezhda M. Bulgakova, Vladimir A. Volodin, Yuzhu Cheng, Yoann Levy, Jiří Beránek, Siva S. Nagisetty, Martin Zukerstein, Alexander A. Popov and Alexander V. Bulgakov

EPJ Web Conf., 266 (2022) 06012

Published online: 24 October 2022

DOI: 10.1051/epjconf/202226606012

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