EPJ Web of Conferences

EDPS Account

Search

Menu

Search

Comparison measurements for hybrid evaluation approaches in optical nanometrology

Tim Käseberg, Bernd Bodermann, Matthias Sturm, Matthias Wurm, Thomas Siefke, Lauryna Siaudinyté, Astrid Tranum Rømer and Poul-Erik Hansen

EPJ Web Conf., 309 (2024) 02005

Published online: 31 October 2024

DOI: 10.1051/epjconf/202430902005

Tim Käseberg

Bernd Bodermann

Matthias Sturm

Matthias Wurm

Thomas Siefke

Lauryna Siaudinyté

Astrid Tranum Rømer

Poul-Erik Hansen

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)

eISSN: 2100-014X