EPJ Web of Conferences

Buried power rails and backside power distribution for nanometer-scale IC design

Daria Ryzhova, Ivan Pavlov and Ivan Asapov

EPJ Web Conf., 321 (2025) 03002

Published online: 10 March 2025

DOI: 10.1051/epjconf/202532103002

Daria Ryzhova

Ivan Pavlov

Ivan Asapov

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