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Sinusoidal phase-modulation interferometer capable of measuring 1D displacement and 2D in-plane displacement

Masato Aketagawa, Masato Higuchi, Itsuki Nagaoka and Kaoru Oe

EPJ Web Conf., 335 (2025) 01018

Published online: 22 September 2025

DOI: 10.1051/epjconf/202533501018

Masato Aketagawa

Masato Higuchi

Itsuki Nagaoka

Kaoru Oe

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