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Table-top HHG EUV scatterometry for roughness and structural parameters evaluation in nano-stacks

Vitaly Krasnov, Len Pasic, Analia Fernandez Herrero, Victor Soltwisch, Esben Witting Larsen, Kevin Dorney, Vicky Philipsen and Claudia Fleischmann

EPJ Web Conf., 335 (2025) 01019

Published online: 22 September 2025

DOI: 10.1051/epjconf/202533501019

Vitaly Krasnov

Len Pasic

Analia Fernandez Herrero

Victor Soltwisch

Esben Witting Larsen

Kevin Dorney

Vicky Philipsen

Claudia Fleischmann

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Articles written by ANY OF the selected authors (OR)

eISSN: 2100-014X