An XPS method for layer profiling of NbN thin films A.V. Lubenchenko, A.A. Batrakov, A.B. Pavolotsky, S. Krause, I.V. Shurkaeva, O.I. Lubenchenko and D.A. Ivanov EPJ Web Conf., 132 (2017) 03053 Published online: 13 December 2016 DOI: 10.1051/epjconf/201713203053