EPJ Web of Conferences

Recent developments in coherent Fourier scatterometry

Anubhav Paul, Sarika Soman and Silvania F. Pereira

EPJ Web Conf., 335 (2025) 03041

Published online: 22 September 2025

DOI: 10.1051/epjconf/202533503041

Anubhav Paul

Sarika Soman

Silvania F. Pereira

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