An XPS method for layer profiling of NbN thin films

A.V. Lubenchenko, A.A. Batrakov, A.B. Pavolotsky, S. Krause, I.V. Shurkaeva, O.I. Lubenchenko and D.A. Ivanov
EPJ Web Conf., 132 (2017) 03053
DOI: 10.1051/epjconf/201713203053

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