An XPS method for layer profiling of NbN thin films

A.V. Lubenchenko, A.A. Batrakov, A.B. Pavolotsky, S. Krause, I.V. Shurkaeva, O.I. Lubenchenko and D.A. Ivanov
EPJ Web Conf., 132 (2017) 03053
Published online: 13 December 2016
DOI: 10.1051/epjconf/201713203053

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