EPJ Web of Conferences

Reactive ion beam etching – based finishing of optical aluminium surfaces

Melanie Ulitschka, Jens Bauer, Frank Frost and Thomas Arnold

EPJ Web Conf., 215 (2019) 04002

Published online: 10 September 2019

DOI: 10.1051/epjconf/201921504002

Melanie Ulitschka

Jens Bauer

Frank Frost

Thomas Arnold

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