EPJ Web of Conferences

Fabrication of nanometre sized gratings via ion irradiation

Johannes Kaufmann, Frank Schrempel and Uwe Zeitner

EPJ Web Conf., 287 (2023) 05003

Published online: 18 October 2023

DOI: 10.1051/epjconf/202328705003

Johannes Kaufmann

Frank Schrempel

Uwe Zeitner

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