Web of Conferences
Open Access
Issue EPJ Web of Conferences
Volume 5, 2010
API'09 - First NanoCharM Workshop on Advanced Polarimetric Instrumentation
Article Number 02001
Number of page(s) 5
Section Scatterometry and metrology of small particles
DOI http://dx.doi.org/10.1051/epjconf/20100502001
Published online 02 June 2010

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