| Issue |
EPJ Web Conf.
Volume 238, 2020
EOS Annual Meeting (EOSAM 2020)
|
|
|---|---|---|
| Article Number | 01001 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 1- Silicon Photonics and Guided-Wave Optics | |
| DOI | https://doi.org/10.1051/epjconf/202023801001 | |
| Published online | 20 August 2020 | |
https://doi.org/10.1051/epjconf/202023801001
Laser processed semiconductors for integrated photonic devices -INVITED
1 Optoelectronics Research Centre, University of Southampton, Southampton, UK
2 School of Electronics and Computer Science, University of Southampton, Southampton, UK
* Corresponding author: acp@orc.soton.ac.uk
Published online: 20 August 2020
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
© The Authors, published by EDP Sciences, 2020
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