EPJ Web Conf.
Volume 238, 2020EOS Annual Meeting (EOSAM 2020)
|Number of page(s)||2|
|Section||Topical Meeting (TOM) 1- Silicon Photonics and Guided-Wave Optics|
|Published online||20 August 2020|
Laser processed semiconductors for integrated photonic devices -INVITED
1 Optoelectronics Research Centre, University of Southampton, Southampton, UK
2 School of Electronics and Computer Science, University of Southampton, Southampton, UK
* Corresponding author: email@example.com
Published online: 20 August 2020
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
© The Authors, published by EDP Sciences, 2020
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