| Issue |
EPJ Web Conf.
Volume 287, 2023
EOS Annual Meeting (EOSAM 2023)
|
|
|---|---|---|
| Article Number | 01001 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 1- Silicon Photonics and Integrated Optics | |
| DOI | https://doi.org/10.1051/epjconf/202328701001 | |
| Published online | 18 October 2023 | |
https://doi.org/10.1051/epjconf/202328701001
Supercontinuum generation in ICP-CVD silicon-rich silicon nitride waveguides
Laboratoire Interdisciplinaire Carnot de Bourgogne, UMR 6303 CNRS Université de Bourgogne, 9 avenue Alain Savary, 21078 Dijon
* Corresponding author: ayesha.jayantha@u-bourgogne.fr
Published online: 18 October 2023
Inductively coupled plasma chemical vapor deposition was used to obtain thin films of siliconrich silicon nitride with a refractive index of 2.44 at optical telecommunications wavelength. The resulting layer was patterned into a 1.6 μm wide waveguide and tested for its nonlinear behavior using a 90-fs all-fiber laser centered at 1630 nm. A significant spectral broadening is demonstrated with a supercontinuum generation from 1300 nm to 1985 nm. Simulations are in fair agreement with the experiments, assuming a nonlinear index of 2 x 10-18 m2/W.
© The Authors, published by EDP Sciences, 2023
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