| Issue |
EPJ Web Conf.
Volume 287, 2023
EOS Annual Meeting (EOSAM 2023)
|
|
|---|---|---|
| Article Number | 02002 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 2- Adaptive and Freeform Optics | |
| DOI | https://doi.org/10.1051/epjconf/202328702002 | |
| Published online | 18 October 2023 | |
https://doi.org/10.1051/epjconf/202328702002
Complex illumination system for fast interferometric measurements
Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany
* Corresponding author: schober@ito.uni-stuttgart.de
Published online: 18 October 2023
Freeform metrology is an enabling technology for today’s research and advanced manufacturing. The Tilted Wave Interferometer is a full field measurement system for fast and flexible measurements. It is based on an off-axis illumination scheme based on a microlens array. In this contribution, we present a novel illumination system for the tilted wave interferometer, that allows to reduce the measurement time by a factor of four using parallelization based on wavelength multiplexing. Here we present a design solution that utilizes the flexibility of 3D-printing. The microlenses are realized as multi-order diffractive optical elements, providing a high efficiency compared to colorfilter based realizations. To boost the light efficiency of the novel illumination system further, a field lens functionality is added to the system by adding individual micro-prisms to each microlens. The system is manufactured by the use of grayscale two-photon polymerisation.
© The Authors, published by EDP Sciences, 2023
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.