| Issue |
EPJ Web Conf.
Volume 335, 2025
EOS Annual Meeting (EOSAM 2025)
|
|
|---|---|---|
| Article Number | 01018 | |
| Number of page(s) | 2 | |
| Section | Face2Phase (F2P) | |
| DOI | https://doi.org/10.1051/epjconf/202533501018 | |
| Published online | 22 September 2025 | |
https://doi.org/10.1051/epjconf/202533501018
Sinusoidal phase-modulation interferometer capable of measuring 1D displacement and 2D in-plane displacement
1 Nagaoka University of Technology, Kamitomioka Nagaoka, Niigata, 940-2021 Japan
2 National Institute of Technology, Gunma College, Toriba, Maebashi, Gunma, 371-8530 Japan
Published online: 22 September 2025
Abstract
Interferometers for displacement measurement with picometer resolution are required. The main cause of degradation of interferometer resolution is air fluctuation. To investigate the effect of air fluctuation on displacement resolution, we have developed a sinusoidal phase modulation interferometer capable of measuring 1D displacement with 10 picometer resolution and 2D in-plane displacement (air fluctuation). The interferometer is of Michelson type with different polarizations in the reference and measurement arms. By exchanging the phase-modulated electro-optical modulator and photodetector of this interferometer, 1D and 2D in-plane displacements can be measured, respectively.
© The Authors, published by EDP Sciences, 2025
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